Controllable fabrication of solid state nanopores array by electron beam shrinking. (15th December 2020)

• Record Type: Journal Article
• Authors: Yuan, Zhishan; Lei, Xin; Wang, Chengyong
• Is Part Of: International journal of machine tools & manufacture. Volume 159(2020)Part B
• Publication Date: 2020-12-15
• Subjects: Solid state nanopores array -- Electron beam shrinking -- Controllable fabrication -- Si3N4 nanopores; Machine-tools -- Periodicals; Manufacturing processes -- Periodicals; Machines-outils -- Périodiques; Fabrication -- Périodiques; Electronic journals; 621.902
• DOI: 10.1016/j.ijmachtools.2020.103623
• Languages: English
• ISSNs: 0890-6955

Abstract

Abstract: Electron beam shrinking is a technique for manufacturing solid-state nanopores with direct visual feedback for better control. The electron beam in scanning electron microscopy (SEM) offers the high-resolution geometry information of nanostructure during the nanopore manufacturing processes. However, the mechanism of electron beam shrinkage is still unclear, which hinders the fabrication of solid-state nanopores array as well as their applications. In this study, Si3 N4 nanopores were used as examples to explore the mechanism of electron beam shrinking. The morphology and composition characterization of the Si3 N4 nanopores before and after shrinking revealed that the deposition of hydrocarbons dominates the shrinking process, accompanied by some decomposition of Si3 N4 . Based on this model, the controlled shrinking of nanopores was achieved, which were assembled into solid state nanopores array. The size of the nanopores can be accurately tuned by adjusting the electron beam accelerating voltage, beam current, and magnification. Under the optimal conditions, the smallest diameter of nanopore of 5.3 nm and the fastest shrinkage rate of 2.51 nm/s were obtained. Meanwhile, solid-state nanopores array, including an axisymmetric nanopore array structure, were also created for detecting translocated AuNPs-DNA through the shrunken nanopores. This study demonstrated a facile technique for fine control of the shape and size of nanopores with designed array patterns, which have great applications in producing nanogap electrodes, complex nanostructure, and surface modification or nanostructure repairing on different materials with desired geometries. Graphical abstract: Image 1 Highlights: The model of electron beam shrinking is established successfully. The shrinkage mechanism of electron beam shrinking is elucidated. The factors affecting the controllable fabrication of solid state nanopores are investigated. Solid state nanopores array is manufactured by electron beam shrinking. The shrunk Si3 N4 nanopore was tested as nanopore sensor successfully.