Cite
HARVARD Citation
Hirata, Y. et al. (2016). Deposition of a-C:H films on a nanotrench pattern by bipolar PBII&D. Journal of physics. p. . [Online].
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Hirata, Y. et al. (2016). Deposition of a-C:H films on a nanotrench pattern by bipolar PBII&D. Journal of physics. p. . [Online].