Fabrication of ultra-flat c-axis oriented ZnO thin films on atomically stepped cyclo-olefin polymer (COP) substrates by pulsed laser deposition at RT. (13th November 2020)

• Record Type: Journal Article
• Authors: Oga, Tomoaki; Yamada, Shiori; Kaneko, Naho; Kaneko, Satoru; Matsuda, Akifumi; Yoshimoto, Mamoru
• Is Part Of: Japanese journal of applied physics. Volume 59:Number 12(2020)
• Publication Date: 2020-11-13
• Subjects: ZnO -- atomic step -- cyclo-olefin polymer -- pulsed laser deposition -- nanoimprint; Physics -- Periodicals; 621.05
• DOI: 10.35848/1347-4065/abc65e
• Languages: English
• ISSNs: 0021-4922

Abstract

Abstract: Highly crystalline c -axis oriented ZnO thin films with ultra-flat surfaces were fabricated by pulsed laser deposition at RT on 0.3 nm high atomically stepped cyclo-olefin polymer (COP) substrates whose surfaces were thermally nanoimprinted using atomically stepped sapphire molds. X-ray diffraction and atomic force microscopy measurements showed that the atomically-controlled surfaces of COP substrates enhanced the c -axis orientation and surface flatness of the crystalline ZnO thin films. The ZnO thin films grown on the atomically stepped COP substrates exhibited atomically stepped surface morphology, and also the optical bandgap of about 3.3 eV and RT resistivity of 5.0 × 10 −2 Ω cm.