Cite
HARVARD Citation
Wang, J. et al. (n.d.). Frequency and damping effect of suspended silicon nitride membranes in water near the megahertz range. Journal of micromechanics and microengineering. p. . [Online].
This is an interim version of our Electronic Legal Deposit Catalogue-eJournals and eBooks while we continue to recover from a cyber-attack.
Wang, J. et al. (n.d.). Frequency and damping effect of suspended silicon nitride membranes in water near the megahertz range. Journal of micromechanics and microengineering. p. . [Online].