Cite
HARVARD Citation
Meyer, T. et al. (n.d.). Etching of GeSe2 chalcogenide glass and its pulsed laser deposited thin films in SF6, SF6/Ar and SF6/O2 plasmas. Plasma sources science & technology. p. . [Online].
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Meyer, T. et al. (n.d.). Etching of GeSe2 chalcogenide glass and its pulsed laser deposited thin films in SF6, SF6/Ar and SF6/O2 plasmas. Plasma sources science & technology. p. . [Online].