Cite
HARVARD Citation
Thao, P. et al. (2017). Epitaxial growth of metallic buffer layer structure and c-axis oriented Pb(Mn1/3, Nb2/3)O3–Pb(Zr, Ti)O3 thin film on Si for high performance piezoelectric micromachined ultrasonic transducer. Japanese journal of applied physics. p. . [Online].