Comparison of Orientation Mapping in SEM and TEM. (August 2020)

• Record Type: Journal Article
• Authors: Sugar, Joshua D.; McKeown, Joseph T.; Banga, Dhego; Michael, Joseph R.
• Is Part Of: Microscopy and microanalysis. Volume 26:Number 4(2020)
• Page Start: 630
• Page End: 640
• Publication Date: 2020-08
• Subjects: materials science, -- electron diffraction, -- electron back-scattered diffraction (EBSD), -- transmission Kikuhi diffraction (TKD), -- precession electron diffraction (PED); Microscopy -- Periodicals; Microchemistry -- Periodicals; 502.82
• DOI: 10.1017/S1431927620001671
• Languages: English
• ISSNs: 1431-9276

Abstract

Abstract: Abstract : Multiple experimental configurations for performing nanoscale orientation mapping are compared to determine their fidelity to the true microstructure of a sample. Transmission Kikuchi diffraction (TKD) experiments in a scanning electron microscope (SEM) and nanobeam diffraction (NBD) experiments in a transmission electron microscope (TEM) were performed on thin electrodeposited hard Au films with two different microstructures. The Au samples either had a grain size that is >50 or <20 nm. The same regions of the samples were measured with TKD apparatuses at 30 kV in an SEM with detectors in the horizontal and vertical configurations and in the TEM at 300 kV. Under the proper conditions, we demonstrate that all three configurations can produce data of equivalent quality. Each method has strengths and challenges associated with its application and representation of the true microstructure. The conditions needed to obtain high-quality data for each acquisition method and the challenges associated with each are discussed.