Sample geometry effect on mechanical property of gold micro-cantilevers by micro-bending test. (September 2020)

• Record Type: Journal Article
• Authors: Suzuki, Kosuke; Chang, Tso-Fu Mark; Hashigata, Ken; Asano, Keisuke; Chen, Chun-Yi; Nagoshi, Takashi; Yamane, Daisuke; Ito, Hiroyuki; Machida, Katsuyuki; Masu, Kazuya; Sone, Masato
• Is Part Of: MRS communications. Volume 10:Number 3(2020)
• Page Start: 434
• Page End: 438
• Publication Date: 2020-09
• Subjects: Materials -- Periodicals; 620.11
• DOI: 10.1557/mrc.2020.38
• Languages: English
• ISSNs: 2159-6859

Abstract

Abstract : Abstract: Sample geometry effects on mechanical strengths of gold micro-cantilevers are evaluated by a micro-bending test. Six micro-cantilevers with the same length of 50 μm are prepared, and the width and the thickness are varied to examine individual effects on the yield stress. The yield stress increases from 428 to 519 MPa when the thickness decreases from 11.1 to 6.0 μm. No obvious dependency is observed when varying the width. The results reveal that the thickness and the width each has a different influence on the yield stresses of micro-cantilevers evaluated by the bending test, which is the sample geometry effect.