Enhanced magnetic sensing performance of diamond MEMS magnetic sensor with boron-doped FeGa film. (December 2020)

• Record Type: Journal Article
• Authors: Zhang, Zilong; Sang, Liwen; Huang, Jian; Chen, Waiyan; Wang, Linjun; Takahashi, Yukiko; Mitani, Seiji; Koide, Yasuo; Koizumi, Satoshi; Liao, Meiyong
• Is Part Of: Carbon. Volume 170(2020)
• Page Start: 294
• Page End: 301
• Publication Date: 2020-12
• Subjects: Diamond -- Magnetic sensors -- MEMS; Carbon -- Periodicals; Carbone -- Périodiques; Koolstof; Toepassingen; Electronic journals; 546.681
• DOI: 10.1016/j.carbon.2020.08.049
• Languages: English
• ISSNs: 0008-6223

Abstract

Abstract: The coupling of single crystal diamond (SCD) micro-electromechanical systems (MEMS) through with a functional hetero-material provides the strategy to develop diamond MEMS sensors. Here a noncontact magnetic sensor based on SCD MEMS resonance system functionalized with a boron-doped FeGa (FeGaB) thin film owning excellent magneto-strictive properties on diamond is demonstrated to improve the magnetic sensitivity. The amorphous FeGaB thin film is beneficial for high magnetic sensing performance. The FeGaB/Ti/SCD MEMS magnetic sensor exhibits magnetic sensitivity of as high as 152.1 Hz/mT, which is over four times of those of FeGa/Ti/SCD MEMS magnetic sensors. The derivative of the Young's modulus change with magnetic field ( dE/dH ) reaches a maximum value of 4.5 GPa/mT at 1.77 mT. By tailoring the magnetic properties with impurity dopant, one can markedly improve the sensitivity of the diamond MEMS magnetic sensitivity toward satisfying the figure-of-merits of ultra-high sensitivity, low noise level and high-reliability magnetic field operation. Graphical abstract: Image 1