Direct-reading Resonant Silicon Cantilever for Probing of Surface Deposits. (2016)

• Record Type: Journal Article
• Authors: Zhang, Shuo; Ding, Yichao; Wu, Wenze; Bertke, Maik; Wasisto, Hutomo Suryo; Doering, Lutz; Brand, Uwe; Peiner, Erwin
• Is Part Of: Procedia engineering. Volume 168(2016)
• Page Start: 658
• Page End: 661
• Publication Date: 2016
• Subjects: thin-film metrology -- viscoelasticity -- contact resonance method -- MEMS technology ;; Engineering -- Congresses; Engineering -- Periodicals; Engineering; Conference proceedings; Periodicals; 620.005
• DOI: 10.1016/j.proeng.2016.11.241
• Languages: English
• ISSNs: 1877-7058

Abstract

Abstract: Contact resonance spectroscopy measurements on thin film deposits based on a tactile piezoresistive silicon microcantilever probe are described. Direct-reading capability during linescans across selectively thin-film-deposited areas of an artefact surface is demonstrated using a phase-locked-loop circuit (PLL). Good agreement found with frequency-sweep measurements followed by line-shape analysis (LSA) including non-linear damping confirm the high potential of the proposed method for non-destructive inline manufacturing-process metrology.