82‐2: Invited Paper: Roll‐to‐Roll Processing of Polysilicon TFTs on Flexible Large Area Stainless Steel Substrates. Issue 1 (29th May 2019) - Chandra, Aditi
Abstract : Roll‐to‐roll (R2R) production of polysilicon CMOS TFTs on steel substrates for electronic devices allows for low‐cost and high‐volume manufacturing, enabling the Internet of Things (IOT). R2R process capabilities are demonstrated along with key equipment considerations and de‐risking approaches for scaling from a sheet‐based to roll‐based process.