82‐2: Invited Paper: Roll‐to‐Roll Processing of Polysilicon TFTs on Flexible Large Area Stainless Steel Substrates. Issue 1 (29th May 2019)

• Record Type: Journal Article
• Authors: Chandra, Aditi; Kamath, Arvind; Bruner, Scott; Beck, Patricia; Fischer, Peter
• Is Part Of: Digest of technical papers. Volume 50:Issue 1(2019)
• Page Start: 1183
• Page End: 1186
• Publication Date: 2019-05-29
• Subjects: Roll-to-Roll -- R2R -- flexible -- polysilicon -- TFT -- stainless steel -- scaling; Information display systems -- Congresses; 621.3815422
• DOI: 10.1002/sdtp.13142
• Languages: English
• ISSNs: 0097-966X

Abstract

Abstract : Roll‐to‐roll (R2R) production of polysilicon CMOS TFTs on steel substrates for electronic devices allows for low‐cost and high‐volume manufacturing, enabling the Internet of Things (IOT). R2R process capabilities are demonstrated along with key equipment considerations and de‐risking approaches for scaling from a sheet‐based to roll‐based process.