P‐9: Reduction and Mechanism of ESD Defect in IGZO‐TFT Formation. Issue 1 (29th May 2019)
- Record Type:
- Journal Article
- Title:
- P‐9: Reduction and Mechanism of ESD Defect in IGZO‐TFT Formation. Issue 1 (29th May 2019)
- Main Title:
- P‐9: Reduction and Mechanism of ESD Defect in IGZO‐TFT Formation
- Authors:
- Liu, Tianzhen
Duan, Xianxue
Xu, Dezhi
Cui, Haifeng
Zhang, Zhihai
Youn, YangSik
Chen, Junsheng
Lee, SeungKyu - Abstract:
- Abstract : In this paper, "IGZO deposition" and "IGZO Photo" are found to be the critical steps that occurs for ESD in Oxide TFTs. The mechanism of ESD has been studied, furthermore, several improvement methods has been proposed.
- Is Part Of:
- Digest of technical papers. Volume 50:Issue 1(2019)
- Journal:
- Digest of technical papers
- Issue:
- Volume 50:Issue 1(2019)
- Issue Display:
- Volume 50, Issue 1 (2019)
- Year:
- 2019
- Volume:
- 50
- Issue:
- 1
- Issue Sort Value:
- 2019-0050-0001-0000
- Page Start:
- 1245
- Page End:
- 1247
- Publication Date:
- 2019-05-29
- Subjects:
- IGZO TFT -- ESD
Information display systems -- Congresses
621.3815422 - Journal URLs:
- http://catalog.hathitrust.org/api/volumes/oclc/1799368.html ↗
http://onlinelibrary.wiley.com/journal/10.1002/(ISSN)2168-0159 ↗
http://ojps.aip.org/dbt/dbt.jsp?KEY=SIDSYM ↗
http://sid.aip.org/digest ↗
http://onlinelibrary.wiley.com/ ↗ - DOI:
- 10.1002/sdtp.13158 ↗
- Languages:
- English
- ISSNs:
- 0097-966X
- Deposit Type:
- Legaldeposit
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library DSC - 8271.680000
British Library DSC - BLDSS-3PM
British Library STI - ELD Digital store - Ingest File:
- 14318.xml