Highly efficient double-taper-type coupler between III–V/silicon-on-insulator hybrid device and silicon waveguide. (21st August 2018)

• Record Type: Journal Article
• Authors: Suzuki, Junichi; Tachibana, Fumihito; Nagasaka, Kumi; Eissa, Moataz S. A. M.; Bai, Liu; Mitarai, Takuya; Amemiya, Tomohiro; Nishiyama, Nobuhiko; Arai, Shigehisa
• Is Part Of: Japanese journal of applied physics. Volume 57:Number 9(2018)
• Publication Date: 2018-08-21
• Subjects: Physics -- Periodicals; 621.05
• DOI: 10.7567/JJAP.57.094101
• Languages: English
• ISSNs: 0021-4922

Abstract

Abstract: An optical mode converter between hybrid device and Si waveguide is the key component for efficient and stable operation of III–V/silicon-on-insulator (SOI) hybrid photonic integrated circuits (PICs). In this study, we introduced a double taper structure into such a mode converter and investigated the coupling efficiency dependence on their structural parameters. By using N2 plasma activated bonding technology, III–V/SOI double-taper-type mode couplers with various taper-tip-widths and taper lengths were fabricated, and their coupling efficiencies were evaluated. As the result, a coupling efficiency of as high as −0.2 dB was achieved for a double-taper device with a tip width of 0.4 µm and total length of 85 µm.