1: Challenges of TFT Technology for AMOLED Display. (4th October 2019) - Zhao, Dongfang
Abstract : Active‐matrix organic light emitting diodes (AMOLEDs) has been widely adopted in small‐, medium‐ and large‐sized displays for applications such as smartphones, automotive dashboards, smart wearables, VR/AR, etc. From the point of view of mass production, AMOLEDs still suffer from the challenges of the TFT backplane technology, due to stringent and sometimes conflicting property requirements for TFTs. Based on a review of the technological trends for AMOLED displays, we will herein systematically analyze the challenges for TFT properties, in terms of their relationships with product performance issues, such as lifetime, mura, and image sticking. It was found that minimizing the Ids‐Vds slope in the saturation region contributes to improvement in lifetime of AMOLEDs. Incorporating an oxidative plasma treatment before gate‐insulator (GI) deposition, a GI annealing process, and a use of a double‐layer (SiO2 /SiN) GI are helpful to reduce the trap density in oxide layer and at the poly‐Si/GI interface, and help improve short‐time image‐sticking.