Investigation of diamond deposition on the diamond, silicon and quartz substrates by microwave plasma chemical vapor deposition and Monte Carlo simulations. (10th July 2019)

• Record Type: Journal Article
• Authors: Reshi, Bilal Ahmad; Kartha, Moses J; Misra, Anuradha; Varma, Raghava
• Is Part Of: Materials research express. Volume 6:Number 9(2019)
• Publication Date: 2019-07-10
• Subjects: diamond thin films -- microwave plasma chemical vapour deposition -- growth exponent -- roughness exponent; Materials science -- Research -- Periodicals; Materials science -- Periodicals; 620.11
• DOI: 10.1088/2053-1591/ab2e8e
• Languages: English
• ISSNs: 2053-1591

Abstract

Abstract: In this paper, a growth mechanism of diamond utilizing Microwave plasma chemical vapor deposition (MPCVD) on various substrates alongside Monte-Carlo simulations is presented for the first time. The values of roughness exponent ( α ) have been estimated on diamond, silicon and quartz substrates while as the growth exponent ( β ) is found out through the grown diamond film on a diamond substrate. The roughness exponent has been investigated by evaluating the height-height correlation function for the diamond interface. For diamond, silicon, and quartz the roughness exponent α is found to be 0.42, 0.21 and 0.25 respectively. The value of α < 0.5 suggests that diamond deposited on silicon and quartz surface has more gagged surface than the diamond deposited on diamond substrates. It has been investigated that the growth exponent β = 0.45 ± 0.18 is dominated by random deposition with diffusion during the growth process. Monte-Carlo simulation with varying sticking probability p has been carried out in order to reconstruct the interface obtained in experiments. It is found that β decreases with sticking probability p. The interface reconstructed through simulations for this sticking probability shows voids and vacancies during the deposition. Raman spectra and x-ray Photoelectron Spectroscopy (XPS) study confirm the diamond phase of carbon (sp 3 ) is present in the grown films. The diamond grown in the setup used for this study exhibits crystalline nature and long-range order as suggested Raman spectroscopy.