Cite
HARVARD Citation
Yahagi, T. et al. (2020). Fabrication of MEMS mold with inclined micro-multi-fin structure and shape transfer to resin by thermal imprint process. Japanese journal of applied physics. p. . [Online].
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Yahagi, T. et al. (2020). Fabrication of MEMS mold with inclined micro-multi-fin structure and shape transfer to resin by thermal imprint process. Japanese journal of applied physics. p. . [Online].