Formation of Cun+ (n=1−3), Arn+ (n = 1, 2), and ArCu+ ions during sputtering of a copper surface by low-energy Ar+ ion bombardment in a dilute argon atmosphere. (29th June 2018)

• Record Type: Journal Article
• Authors: Hippler, Rainer; Denker, Christian
• Is Part Of: Plasma sources science & technology. Volume 27:Number 6(2018:Dec.)
• Publication Date: 2018-06-29
• Subjects: ion beam plasma -- ion-surface interaction -- ion mass spectrometry -- sputtering -- cluster formation; Plasma (Ionized gases) -- Periodicals; 530.44
• DOI: 10.1088/1361-6595/aacb5c
• Languages: English
• ISSNs: 0963-0252

Abstract

Abstract: Formation of monoatomic Ar + and Cu +, diatomic Ar 2 +, ArCu +, and Cu 2 +, and triatomic Cu 3 + ions during 500 eV Ar + ion bombardment of a copper surface in a dilute argon atmosphere was investigated by means of energy-resolved mass spectrometry. Energy spectra of Ar n + ( n = 1, 2), Cu n + ( n = 1 − 3 ), and ArCu + ions show distinct features which are related to the specific formation processes taking place in the plasma region and during ion bombardment of the Cu cathode.