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HARVARD Citation
Bärwolf, F. et al. (2019). Dynamic SIMS, spectroscopic ellipsometry and x-ray diffractometry analysis of SiGe HBTs with Ge grading. Semiconductor science and technology. p. . [Online].
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Bärwolf, F. et al. (2019). Dynamic SIMS, spectroscopic ellipsometry and x-ray diffractometry analysis of SiGe HBTs with Ge grading. Semiconductor science and technology. p. . [Online].