Analysis of leaky surface acoustic wave characteristics propagating on high piezoelectric ScAlN film/high velocity quartz substrate. (23rd April 2020)

• Record Type: Journal Article
• Authors: Suzuki, Masashi; Kakio, Shoji
• Is Part Of: Japanese journal of applied physics. Volume 59:Number SK(2020)
• Publication Date: 2020-04-23
• Subjects: ScAlN film -- leaky surface acoustic wave -- layered structure substrate; Physics -- Periodicals; 621.05
• DOI: 10.35848/1347-4065/ab867f
• Languages: English
• ISSNs: 0021-4922

Abstract

Abstract: Recently, it has been reported that leaky surface acoustic waves (LSAWs) and longitudinal LSAWs on piezoelectric LiNbO3 and LiTaO3 thin plates bonded to high velocity quartz substrates have high phase velocity, high coupling, and low attenuation. These lead to high-frequency operation, a wide band-width, and a high Q factor for next generation SAW filters. Moreover, we theoretically demonstrated that longitudinal LSAWs on high piezoelectric ScAlN films/quartz substrates also possesses high phase velocity, high coupling, and low attenuation. In this paper, LSAW characteristics on ScAlN films/quartz substrates were investigated theoretically. When the Euler angles and the film thickness of the ScAlN film and quartz substrate were optimized for LSAW, the LSAW resonators with (0° 90° 72°) Sc0.4 Al0.6 N film/(0° 128.5° 0°) quartz were found to have a high Q factor of ∼21 610 and a high coupling of ∼5.8%.