A Silicon MEMS EM vibration energy harvester. (November 2019)

• Record Type: Journal Article
• Authors: Yang, Y.; Radhakrishna, U.; Ward, D.; Chandrakasan, A. P.; Lang, J. H.
• Is Part Of: Journal of physics. Volume 1407(2019)
• Publication Date: 2019-11
• Subjects: Physics -- Congresses; 530.5
• DOI: 10.1088/1742-6596/1407/1/012022
• Languages: English
• ISSNs: 1742-6588

Abstract

Abstract: This paper presents an optimized silicon-MEMS electromagnetic vibration energy harvester suitable for applications such as machine health monitoring. The harvester comprises a DRIE-etched silicon suspension, and pick-and-place N42 NdBFe magnets and copper coils, housed in a 3D-printed package. The harvester is designed to operate near 50 Hz with 0.5-1 g vibrations using a long-stroke suspension. Multi-domain harvester optimization results in an open-circuit voltage of 1.7 V, a matched-load power output of 2.2 mW, and a matched-load power-output density of 1.23 mW/cm 3 at 1.1 g with a resonance frequency of 76.3 Hz .