Application of microprobe soft X-ray fluorescence and absorption spectroscopic analyses to characterize the buried multi-layered micro-structure. (29th May 2020)

• Record Type: Journal Article
• Authors: Oura, Masaki; Ishihara, Tomoko; Yamaguchi, Akinobu
• Is Part Of: Japanese journal of applied physics. Volume 59:Number 6(2020)
• Publication Date: 2020-05-29
• Subjects: soft X-ray -- microprobe -- spectromicroscopy -- X-ray fluorescence analysis -- μXAS; Physics -- Periodicals; 621.05
• DOI: 10.35848/1347-4065/ab9461
• Languages: English
• ISSNs: 0021-4922

Abstract

Abstract: We have applied a recently developed scanning soft X-ray (SX) spectromicroscope to characterize the buried multi-layered micro-structure by means of microprobe X-ray fluorescence ( μ XRF) analyses. We could successfully visualize single element maps of O and Fe contained in a buried 500 μ m square test-pattern made of SiO2 and Ni81 Fe19 (permalloy) beneath 30 nm thick Au coating. For their chemical-state analyses, we measured O K α and Fe L α X-rays emitted from the buried micro-structure using a SX microprobe to explore the X-ray absorption spectroscopy spectra of O and Fe contained in a local area by partial fluorescence yield spectroscopy.