Design and engineering of Mn conical sculptured thin films as both electrodes for a gas sensor: ionization and field emission studies. (19th May 2020)

• Record Type: Journal Article
• Authors: Chahshouri, Fatemeh; Savaloni, Hadi; Khani, Elahe; Savari, Rojan
• Is Part Of: Journal of micromechanics and microengineering. Volume 30:Number 7(2020:Jul.)
• Publication Date: 2020-05-19
• Subjects: gas ionization sensor -- field emission -- Paschen's law -- Mn sculptured thin film -- selectivity -- sensitivity; Microelectromechanical systems -- Periodicals; Micromechanics -- Periodicals; 621.38105
• DOI: 10.1088/1361-6439/ab896e
• Languages: English
• ISSNs: 0960-1317

Abstract

Abstract: Paschen's law and deviation from Paschen's law are studied in a face to face gas sensor based on Mn helical sculptured thin films with conical shape as cathode and anode electrodes. The sensor's performance was investigated at dynamic pressures ranging from 0.1 to 1000 mbar and 3 to 200 μ m gaps between the two electrodes and for nitrogen, air and carbon monoxide gases. Results showed that at distances more than 10 μ m the Paschen's law is satisfied but at lower than 10 μ m distances between the two electrodes and pressures more than 250 mbar deviations occur from the Paschen's law. Selectivity results of the sensor showed that under all conditions studied in this work and for all gases there is a good resolution between the results and this enhances with gas pressure. Comparison of the results of the present sensor with those reported in the literature showed higher sensitivity of the present work for different gases investigated.