Cite
HARVARD Citation
Liu, C. et al. (2020). Properties of organosilicate low-k films with 1, 3- and 1, 3, 5-benzene bridges between Si atoms. Japanese journal of applied physics. p. . [Online].
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Liu, C. et al. (2020). Properties of organosilicate low-k films with 1, 3- and 1, 3, 5-benzene bridges between Si atoms. Japanese journal of applied physics. p. . [Online].