Cite
HARVARD Citation
Ishiji, K. et al. (2020). Correlation between crystal warpage and swelling of 4H-SiC through implantation and annealing. Semiconductor science and technology. p. . [Online].
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Ishiji, K. et al. (2020). Correlation between crystal warpage and swelling of 4H-SiC through implantation and annealing. Semiconductor science and technology. p. . [Online].