Highly sensitive nitric oxide gas sensor based on ZnO-nanorods vertical resistor operated at room temperature. (4th January 2019)

• Record Type: Journal Article
• Authors: Singh, Pragya; Hu, Li-Lun; Zan, Hsiao-Wen; Tseng, Tseung-Yuen
• Is Part Of: Nanotechnology. Volume 30:Number 9(2019)
• Publication Date: 2019-01-04
• Subjects: nitric oxide -- ZnO -- nanorods thin film -- vertical channel -- gas sensor -- metal oxide semiconductor; Nanotechnology -- Periodicals; Nanotechnology -- Periodicals; Nanotechnology; Publications périodiques; Nanotechnologies; Periodicals; 620.5
• DOI: 10.1088/1361-6528/aaf7cb
• Languages: English
• ISSNs: 0957-4484

Abstract

Abstract: We successfully demonstrated a simple and low-cost nitric oxide (NO) gas sensor to deliver parts-per-billion (ppb) regime detection at room temperature operation. A vertical-channel ZnO nanorods resistor is fabricated by putting silver nanowire electrode onto the hydrothermal ZnO nanorods film. With suitable process condition, the nanorods film exhibits a uniform morphology to enable the formation of gas-permeable nanowire top electrode while also the nanorods provide good surface-to-volume ratio to deliver strong reaction with NO gas. A detection limit to 10 ppb NO is observed while the sensing dynamic range from 10 ppb to 100 ppb is obtained. The sensor is reversible and the real-time sensing response is within 30 s. The results benefit the NO breath detection for patients with chronic inflammatory airway disease, such as asthma.