A gasket-type standard leak element using femtosecond laser micromachining. (October 2020)

• Record Type: Journal Article
• Authors: Chan, C.K.; Tu, C.Y.; Yeh, S.D.; Chang, C.C.; Lin, T.C.; Luo, C.W.; Hwang, C.S.
• Is Part Of: Vacuum. Volume 180(2020)
• Publication Date: 2020-10
• Subjects: Leak element -- Femtosecond laser ablation -- Molecular flow conductance -- Microfluidic; Vacuum -- Periodicals; 621.55
• DOI: 10.1016/j.vacuum.2020.109650
• Languages: English
• ISSNs: 0042-207X

Abstract

Abstract: A gasket-type standard leak element with a microfluidic channel was developed and measured. The microfluidic channel with a diameter of several micrometers and a length of one hundred micrometers was fabricated by using femtosecond laser micromachining. The conductances (<1 × 10 −6 L s −1 ) of the microfluidic channel for various non-condensable gases -- H2, He, CH4, N2 and CO2 were determined by a measuring system based on conductance modulation (CM) method. The experimental results show that the flow characteristics of our devices exhibit molecular flow at a pressure up to 100 mbar and the conductance values of H2, He, CH4, N2 and CO2 are inversely proportional to the square root of their molecular mass. Highlights: A gasket-type standard leak element with a microfluidic channel was developed. A tiny conductance of about 4 × 10 −8 L s −1 for N2 can be achieved. A strong dependence of the conductance on the inverse square root of the molecular mass was observed in this device.