Cite
HARVARD Citation
Kim, J. et al. (2020). Influence of hydrogen and oxygen on the structure and properties of sputtered magnesium zirconium oxynitride thin films. Journal of materials chemistry. 8 (18), pp. 9364-9372. [Online].
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Kim, J. et al. (2020). Influence of hydrogen and oxygen on the structure and properties of sputtered magnesium zirconium oxynitride thin films. Journal of materials chemistry. 8 (18), pp. 9364-9372. [Online].