Graphene-like film CVD on e-beam exposed SiO2/Si by the pyrolysis of different oxygen-containing precursors. Issue 4 (2nd April 2020)

• Record Type: Journal Article
• Authors: Sedlovets, Daria M.; Knyazev, Maxim A.; Trofimov, Oleg V.; Koveshnikov, Sergei V.
• Is Part Of: Fullerenes, nanotubes and carbon nanostructures. Volume 28:Issue 4(2020)
• Page Start: 309
• Page End: 312
• Publication Date: 2020-04-02
• Subjects: Electron beam -- electron exposure -- CVD -- graphene-like films; Fullerenes -- Periodicals; Nanotubes -- Periodicals; Nanostructures -- Periodicals; 546.6812
• DOI: 10.1080/1536383X.2019.1708731
• Languages: English
• ISSNs: 1536-383X

Abstract

ABSRTACT: We have previously found that pyrolysis of ethanol vapor on charge pre-patterned SiO2 /Si substrate leads to controllable deposition of graphene-like films (GLFs). In this work we aim at the GLFs synthesis from acetone and isopropanol on SiO2/Si exposed to an electron beam with various energies and doses. Electron beam induced charge in 200 nm SiO2 is determined by the shift of the capacitance-voltage characteristics. Synthesized GLFs are characterized using Raman spectroscopy and atomic force microscopy. It is shown that the thickness of GLF on SiO2 /Si increase together with the preliminary exposure dose and inversely associated with electron energies.