Ultrasonic Spray Deposition of a‐IGZO Thin Film Transistor on Substrate with Hydrophilic Patterns. (17th July 2020)

• Record Type: Journal Article
• Authors: Qiu, Hengda; Sun, Hejing; Zheng, Libin; Xiao, Juncheng; Zhou, Hang
• Is Part Of: Digest of technical papers. Volume 51(2020)Supplement 1
• Page Start: 187
• Page End: 189
• Publication Date: 2020-07-17
• Subjects: a-IGZO -- thin-film transistor -- coffee-ring effect -- ultrasonic spray; Information display systems -- Congresses; 621.3815422
• DOI: 10.1002/sdtp.13786
• Languages: English
• ISSNs: 0097-966X

Abstract

Abstract : Solution‐processed amorphous Indium Gallium Zinc Oxide (a‐IGZO) is a promising method for lower down the fabrication cost a‐IGZO thin‐film transistor (TFTs). Here we demonstrate an ultrasonic sprayed a‐IGZO TFT, whose fabrication is assisted by hydrophobic parallel stripe patterns to circumvent the coffee‐ring effect. Device mobility of the sprayed a‐IGZO TFT is estimated to be 1.74 cm 2 V −1 s −1 .