Microstructures and properties of Mo2N+MoS2 coatings deposited by direct current magnetron sputtering. (July 2020) - Sun, Li
Abstract: In order to investigate the microstructures and properties of Mo2 N + MoS2 coatings, MoS2, Mo2 N and Mo2 N + MoS2 coatings were deposited by direct current magnetron sputtering. The crystalline structure, surface and cross-sectional morphology, hardness and friction coefficient are characterized by X-ray diffraction, field emission scanning electron microscopy, nanoindentation and sliding tester, respectively. The results indicate that the Mo2 N + MoS2 composite coatings are composed of Mo2 N and MoS2 phases, but the (002) crystalline orientation of MoS2 phase is not detected in the composite coatings. The composite coatings display fine and compact columnar layer structure. The hardness and friction coefficient of composite coatings are about 17 GPa and 0.4, respectively. Compared with pure MoS2 or Mo2 N, the overall performance of composite coatings is improved, which is attributed to the change of coating microstructures. Highlights: Mo2 N + MoS2 coatings were successful prepared by DC magnetron sputtering. The structure of MoS2 was affected in the Mo2 N + MoS2 composite coatings. Hardness of Mo2 N + MoS2 coatings is about 17 GPa at 5% MoS2 target area. Friction coefficient of Mo2 N + MoS2 coatings is about 0.4 at 5% MoS2 target area.