Cite
HARVARD Citation
Schneider, J. et al. (2020). The Influence of Ozone: Superstoichiometric Oxygen in Atomic Layer Deposition of Fe2O3 Using tert‐Butylferrocene and O3. Advanced materials interfaces. 7 (11), p. n/a. [Online].
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Schneider, J. et al. (2020). The Influence of Ozone: Superstoichiometric Oxygen in Atomic Layer Deposition of Fe2O3 Using tert‐Butylferrocene and O3. Advanced materials interfaces. 7 (11), p. n/a. [Online].