Insights into plasma‐assisted polymerization at atmospheric pressure by spectroscopic diagnostics. Issue 6 (25th November 2019)

• Record Type: Journal Article
• Authors: Barletta, Federica; Leys, Christophe; Colombo, Vittorio; Gherardi, Matteo; Britun, Nikolay; Snyders, Rony; Nikiforov, Anton
• Other Names: Benedikt Jan guestEditor.; Snyders Rony guestEditor.
• Is Part Of: Plasma processes and polymers. Volume 17:Issue 6(2020)
• Page Start: n/a
• Page End: n/a
• Publication Date: 2019-11-25
• Subjects: active species -- laser scattering -- plasma diagnostics -- plasma jet -- plasma polymerization; Plasma polymerization -- Periodicals; Plasma-enhanced chemical vapor deposition -- Periodicals; Plasma chemistry -- Periodicals
• DOI: 10.1002/ppap.201900174
• Languages: English
• ISSNs: 1612-8850

Abstract

Abstract: In the present work, a polydiagnostic study of an atmospheric pressure plasma jet specifically designed for the deposition of coatings by using an Ar/tetraethyl orthosilicate (TEOS) mixture is undertaken. Both passive and active diagnostic methods are utilized to shed light on the complexity of gas‐phase mechanisms of precursor fragmentation. A detailed characterization is performed by (fast imaging) optical emission spectroscopy (OES) to clarify the spatial–temporal behavior of excited species. The influence of the TEOS admixture on gas temperature is studied by OES and Rayleigh scattering techniques. The evolution of streamers and their influence on radical formation in the treatment zone is also discussed. Abstract : Deposition of Si‐based thin films on thermosensitive materials has high industrial potential in a variety of fields. Active and passive diagnostic methods are used for an in‐depth understanding of discharge physics, gas‐phase precursor fragmentation mechanisms, and spatio–temporal behaviors of excited species behind an atmospheric pressure deposition process in an Ar/TEOS mixture.