Energetics of reactions in a dielectric barrier discharge with argon carrier gas: VIII hydrofluoromethanes. Issue 6 (25th August 2019)

• Record Type: Journal Article
• Authors: Watson, Sean; Nisol, Bernard; Wertheimer, Michael R.
• Other Names: Benedikt Jan guestEditor.; Snyders Rony guestEditor.
• Is Part Of: Plasma processes and polymers. Volume 17:Issue 6(2020)
• Page Start: n/a
• Page End: n/a
• Publication Date: 2019-08-25
• Subjects: Plasma polymerization -- Periodicals; Plasma-enhanced chemical vapor deposition -- Periodicals; Plasma chemistry -- Periodicals
• DOI: 10.1002/ppap.201900125
• Languages: English
• ISSNs: 1612-8850

Abstract

Abstract: The method we have developed for understanding energetic exchanges between precursor molecules and argon (Ar) carrier gas in a dielectric barrier discharge (DBD) has much‐proven merit. The present article focuses on hydrofluoromethanes, CH x F y . The precursors (‰ concentrations) were mixed with Ar in a 20 kHz, 8 kV (peak‐to‐peak) DBD. For each compound, E m, the energy absorbed per molecule, was plotted as a function of precursor flow rate. Besides the determination of E m, we have used optical emission spectroscopy as a diagnostic of the plasma physicochemistry. The influence of chemical structure has been investigated by depositing thin plasma polymer coatings; we have measured their deposition rates and water contact angles, which have been correlated with E m values and X‐ray photoelectron spectroscopy measurements. Abstract : Dielectric barrier discharge experiments at atmospheric pressure with an argon carrier gas and five hydrofluoromethane molecules, CH x F y (0 ≤ x ≤ 4; y = 4 – x ) have been used to measure the energy absorbed from the plasma by each molecule. The influence of H/F ratio has been examined with respect to optical emission spectroscopy, plasma polymer (PP) film growth, and properties (X‐ray photoelectron spectroscopy‐derived composition, water contact angle) of resulting PP coatings.