Zinc Oxide: From Precursor Chemistry to Gas Sensors: Plasma‐Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications (Small 22/2020). Issue 22 (4th June 2020)

• Record Type: Journal Article
• Authors: Mai, Lukas; Mitschker, Felix; Bock, Claudia; Niesen, Alessia; Ciftyurek, Engin; Rogalla, Detlef; Mickler, Johannes; Erig, Matthias; Li, Zheshen; Awakowicz, Peter; Schierbaum, Klaus; Devi, Anjana
• Is Part Of: Small. Volume 16:Issue 22(2020)
• Page Start: n/a
• Page End: n/a
• Publication Date: 2020-06-04
• Subjects: atomic layer deposition -- gas barrier layers -- gas sensors -- zinc oxide -- zinc precursors; Nanotechnology -- Periodicals; Nanoparticles -- Periodicals; Microtechnology -- Periodicals; 620.5
• DOI: 10.1002/smll.202070122
• Languages: English
• ISSNs: 1613-6810

Abstract

Abstract : In article number 1907506, Anjana Devi and co‐workers introduce a new, nonpyrophoric zinc precursor for plasma enhanced atomic layer deposition (PEALD) of zinc oxide (ZnO). Here, oxygen plasma is used to react with adsorbed zinc precursor on chemiresistor structures to form highly pure ZnO which is used effectively as a selective gas sensing layer for NO2 in a functional gas sensor device.