High‐efficiency ultra‐precision comparator for d‐spacing mapping measurement of silicon. (13th March 2020)
- Record Type:
- Journal Article
- Title:
- High‐efficiency ultra‐precision comparator for d‐spacing mapping measurement of silicon. (13th March 2020)
- Main Title:
- High‐efficiency ultra‐precision comparator for d‐spacing mapping measurement of silicon
- Authors:
- Yang, Junliang
Li, Tang
Zhu, Ye
Zhang, Xiaowei
Waseda, Atsushi
Fujimoto, Hiroyuki - Abstract:
- Abstract : The development of a wide‐beam ultra‐precision d ‐spacing mapping measurement system that is more than ten times faster than the previous pencil‐beam method is presented. Abstract : This article describes a high‐efficiency experimental configuration for a self‐referenced lattice comparator with a `brush beam' of synchrotron radiation from a bending magnet and two linear position‐sensitive photon‐counting‐type X‐ray detectors. The efficiency is more than ten times greater compared with the `pencil‐beam' configuration and a pair of zero‐dimensional detectors. A solution for correcting the systematic deviation of d ‐spacing measurements caused by the horizontal non‐uniformity of the brush beam is provided. Also, the use of photon‐counting‐type one‐dimensional detectors not only improves the spatial resolution of the measurements remarkably but can also adjust the sample's attitude angles easily.
- Is Part Of:
- Journal of synchrotron radiation. Volume 27:Part 3(2020)
- Journal:
- Journal of synchrotron radiation
- Issue:
- Volume 27:Part 3(2020)
- Issue Display:
- Volume 27, Issue 3, Part 3 (2020)
- Year:
- 2020
- Volume:
- 27
- Issue:
- 3
- Part:
- 3
- Issue Sort Value:
- 2020-0027-0003-0003
- Page Start:
- 577
- Page End:
- 582
- Publication Date:
- 2020-03-13
- Subjects:
- self‐referenced lattice comparator -- d‐spacing of silicon -- 1D X‐ray photon‐counting detector -- pencil beam -- brush beam
Synchrotron radiation -- Periodicals
Free electron lasers -- Periodicals
539.73505 - Journal URLs:
- http://onlinelibrary.wiley.com/journal/10.1107/S16005775 ↗
http://journals.iucr.org/s/journalhomepage.html ↗
http://www.blackwell-synergy.com/openurl?genre=journal&issn=0909-0495 ↗
http://onlinelibrary.wiley.com/ ↗
http://firstsearch.oclc.org ↗ - DOI:
- 10.1107/S1600577520001496 ↗
- Languages:
- English
- ISSNs:
- 0909-0495
- Deposit Type:
- Legaldeposit
- View Content:
- Available online (eLD content is only available in our Reading Rooms) ↗
- Physical Locations:
- British Library DSC - 5068.035000
British Library DSC - BLDSS-3PM
British Library STI - ELD Digital store - Ingest File:
- 13127.xml