Cite
HARVARD Citation
Ge, W. et al. (2020). Large-area fabrication of TiN thin films with photothermal effect via PECVD. Ceramics international. 46 (6), pp. 7355-7361. [Online].
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Ge, W. et al. (2020). Large-area fabrication of TiN thin films with photothermal effect via PECVD. Ceramics international. 46 (6), pp. 7355-7361. [Online].