Scalable, and low-cost treating-cutting-coating manufacture platform for MXene-based on-chip micro-supercapacitors. (March 2020)

• Record Type: Journal Article
• Authors: Huang, Haichao; He, Jiaqi; Wang, Zixing; Zhang, Haitao; Jin, Long; Chen, Ningjun; Xie, Yanting; Chu, Xiang; Gu, Bingni; Deng, Weili; Yang, Weiqing
• Is Part Of: Nano energy. Volume 69(2020)
• Publication Date: 2020-03
• Subjects: Ti3C2Tx MXene -- On chip -- Micro-supercapacitors -- Manufacture platform -- Interface; Nanoscience -- Periodicals; Nanotechnology -- Periodicals; Nanostructured materials -- Periodicals; Power resources -- Technological innovations -- Periodicals; Nanoscience; Nanostructured materials; Nanotechnology; Power resources -- Technological innovations; Periodicals; 621.042
• DOI: 10.1016/j.nanoen.2019.104431
• Languages: English
• ISSNs: 2211-2855

Abstract

Abstract: The rapid development of silicon-based microelectronic devices urgently demand for compatibly silicon-based micro-supercapacitors (MSCs) with smaller size, higher power density, and higher integration density. However, there are still some challenges in fabricating silicon-based MSCs, such as weakly-connected interface and expensively-manufactured process. Here we demonstrate a scalable and low-cost treating-cutting-coating (TCC) manufacture platform for Ti3 C2 T x MXene-based on-chip MSCs. The hydrophilical treating of silicon/silicon dioxide (Si/SiO2 ) surface can effectively enforce MXene-silicon interface adhesion, resulting in the improved integrity and uniformity of MXene films. Subsequently, cold laser-cutting followed by spin-coating can rapidly prepare the MXene-based electrodes on the kapton-masked Si/SiO2 substrates. This as-obtained MSC displays a high areal and volumetric capacitance of 472 μF cm −2 and 21.4 F cm −3, incorporating with outstanding cycling stability of over 87.6% capacitance retention after 10 000 cycles. Evidently, this treating-cutting-coating manufacture process will support a general platform toward scalable on-chip energy storage devices based on 2D materials. Graphical abstract: Image 1 Highlights: We developed a scalable and low-cost TCC manufacture platform for silicon-based MSCs that can be extended to other MXenes. The hydrophilical treating of silicon surface can effectively enforce MXene-silicon interface adhesion. The as-prepared on-chip MSCs exhibit high capacity performance, high power density and outstanding cyclic capability.