Dynamic spring constants of higher resonance modes of uniform and tapered microcantilevers with tip masses. (February 2020)

• Record Type: Journal Article
• Authors: Mahmoud, M.A.
• Is Part Of: Micron. Volume 129(2020)
• Publication Date: 2020-02
• Subjects: Spring constant -- Dynamic stiffness -- Tapered cantilever -- MEMS -- Resonance -- Calibration -- Higher modes -- Vibration; Microscopy -- Periodicals; Electron Probe Microanalysis -- Periodicals; Microscopy -- Periodicals; Microscopie -- Périodiques; Microscopy; Periodicals; 502.82
• DOI: 10.1016/j.micron.2019.102795
• Languages: English
• ISSNs: 0968-4328

Abstract

Highlights: Exact closed form expressions of dynamic stiffness are presented for the first time for uniform cantilevers with a tip mass. Closed solutions of the resonance frequency and dynamic stiffness are presented for tapered cantilevers. Procedures of improving higher mode stiffness calibration are outlined. Abstract: A comprehensive data set is presented that covers eigenvalues and dynamic stiffness of width-tapered microcantilevers for a wide range of the taper ratio and tip mass ratios. Closed form expressions are presented, which could help designers and researchers in the MEMS field in general, and atomic force microscopy in particular.