Cite
HARVARD Citation
Song, K. et al. (2019). Scheduling and Control of a Wafer Transfer Robot for Foundry Equipment Innovation Competition. IFAC-PapersOnLine. 52 (15), pp. 627-632. [Online].
This is an interim version of our Electronic Legal Deposit Catalogue-eJournals and eBooks while we continue to recover from a cyber-attack.
Song, K. et al. (2019). Scheduling and Control of a Wafer Transfer Robot for Foundry Equipment Innovation Competition. IFAC-PapersOnLine. 52 (15), pp. 627-632. [Online].