Thermal stability of laser-induced modified volumes in Si as studied by in situ and ex situ heating experiments. (21st February 2018)

• Record Type: Journal Article
• Authors: Saka, Hiroyasu; Iwata, Hiroyuki; Kawaguchi, Daisuke
• Is Part Of: Microscopy. Volume 67:Number 2(2018)
• Page Start: 112
• Page End: 120
• Publication Date: 2018-02-21
• Subjects: laser -- (scanning) transmission electron microscopy -- internal modification -- Si -- voids -- stability; Microscopy -- Periodicals; 502.825
• DOI: 10.1093/jmicro/dfy008
• Languages: English
• ISSNs: 2050-5698

Abstract

Abstract : Radiation of laser-beam into Si induces considerable modification of structures. Thermal stability of laser-induced modified volumes was studied by in-situ and ex-situ heating experiments using TEM. Behavior in tail region can be understood by dislocation theory, while that of voids formed at the focus of laser-beam cannot be understood easily. Abstract: Radiation of a permeable laser beam into Si induces considerable modification of structures. Thermal stability of the laser-induced modified volumes (LIMV's) was studied comprehensively by means of in situ and ex situ heating experiments using transmission electron microscopy. The behavior in the tail region of a LIMV can be understood by dislocation theory, while that of a void formed at the very focus of a laser beam cannot be understood easily.