Development of a Planarization Process for the Fabrication of Nanocrystalline Diamond Based Photonic Structures. Issue 21 (7th November 2019)

• Record Type: Journal Article
• Authors: Heupel, Julia; Felgen, Nina; Merz, Rolf; Kopnarski, Michael; Reithmaier, Johann Peter; Popov, Cyril
• Other Names: Becher Christoph guestEditor.; Pobedinskas Paulius guestEditor.
• Is Part Of: Physica status solidi. Volume 216:Issue 21(2019)
• Page Start: n/a
• Page End: n/a
• Publication Date: 2019-11-07
• Subjects: Solid state physics -- Periodicals; Solids -- Industrial applications -- Periodicals; 530.41
• DOI: 10.1002/pssa.201970072
• Languages: English
• ISSNs: 1862-6300

Abstract

Abstract : Smoothened Nanocrystalline Diamond Surface A planarization of nanocrystalline diamond (NCD) films utilizing spin‐on‐glass (SOG) consisting of perhydropolysilazane and subsequent O2 /SF6 plasma etching leads to a significant surface roughness reduction. The scattering effects during e‐beam lithography are minimized and the quality of the fabricated nanostructures (nanopillars and photonic crystals) is considerably improved. More details can be found in article number 1900314 by Julia Heupel, Cyril Popov and co‐workers.