Phase shifting method for non-sinusoidal interference fringes with phase shift error. (21st October 2019)

• Record Type: Journal Article
• Authors: Lian, Songzhe; Yang, Haiquan; Kudo, Hiroyuki; Takano, Hidekazu; Momose, Atsushi
• Is Part Of: Japanese journal of applied physics. Volume 58:Number 11(2019)
• Publication Date: 2019-10-21
• Subjects: Physics -- Periodicals; 621.05
• DOI: 10.7567/1347-4065/ab4a96
• Languages: English
• ISSNs: 0021-4922

Abstract

Abstract: When applying phase shifting interferometry to practical phase measurement, the wave may become non-sinusoidal, and could include some phase shift errors. Prior phase shift algorithms are primarily used for sinusoidal cases, and can cause system errors when used for these non-sinusoidal interference. We propose two phase recovery methods for non-sinusoidal interference fringes: specifically, a least-squares-based fitting algorithm that eliminates system errors using a sufficient number of measured images, and a Fourier transform-based method that effectively suppresses system errors using a lower (or insufficient) number of images. Simulation and experimental results verify the efficacy of the proposed methods.