The Multipole Resonance Probe-based controller: a technology to investigate plasma-based deposition. (8th October 2019)

Record Type:: Journal Article
Title:: The Multipole Resonance Probe-based controller: a technology to investigate plasma-based deposition. (8th October 2019)
Main Title:: The Multipole Resonance Probe-based controller: a technology to investigate plasma-based deposition
Authors:: Woelfel, C.
Oberberg, M.
Berger, B.
Engel, D.
Brinkmann, R.P.
Awakowicz, P.
Lunze, J.
Schulze, J.
Abstract:
Is Part Of:: Journal of instrumentation. Volume 14:Number 10(2019)
Journal:: Journal of instrumentation
Issue:: Volume 14:Number 10(2019)
Issue Display:: Volume 14, Issue 10 (2019)
Year:: 2019
Volume:: 14
Issue:: 10
Issue Sort Value:: 2019-0014-0010-0000
Page Start:: P10007
Page End:: P10007
Publication Date:: 2019-10-08
Subjects:: Scientific apparatus and instruments -- Periodicals
502.84
Journal URLs:: http://iopscience.iop.org/1748-0221 ↗
http://ioppublishing.org/ ↗
DOI:: 10.1088/1748-0221/14/10/P10007 ↗
Languages:: English
ISSNs:: 1748-0221
Deposit Type:: Legaldeposit
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗
Physical Locations:: British Library DSC - BLDSS-3PM
British Library HMNTS - ELD Digital store
Ingest File:: 12016.xml