Cite
HARVARD Citation
Pan, D. (2019). Numerical study on the effectiveness of precursor isolation using N2 as gas barrier in spatial atomic layer deposition. International journal of heat and mass transfer. p. . [Online].
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Pan, D. (2019). Numerical study on the effectiveness of precursor isolation using N2 as gas barrier in spatial atomic layer deposition. International journal of heat and mass transfer. p. . [Online].