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HARVARD Citation
Hellgren, N. et al. (2019). High-power impulse magnetron sputter deposition of TiBx thin films: Effects of pressure and growth temperature. Vacuum. p. . [Online].
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Hellgren, N. et al. (2019). High-power impulse magnetron sputter deposition of TiBx thin films: Effects of pressure and growth temperature. Vacuum. p. . [Online].