Advanced Characterization Methods for Electrical and Sensoric Components and Devices at the Micro and Nano Scales. Issue 19 (15th October 2019)

• Record Type: Journal Article
• Authors: Sheremet, Evgeniya; Meszmer, Peter; Blaudeck, Thomas; Hartmann, Susanne; Wagner, Christian; Ma, Bing; Hermann, Sascha; Wunderle, Bernhard; Schulz, Stefan E.; Hietschold, Michael; Rodriguez, Raul D.; Zahn, Dietrich R. T.
• Other Names: Zahn Dietrich R.T. guestEditor.; Schulz Stefan E. guestEditor.; Hiller Karla guestEditor.; Wagner Christian guestEditor.; Reuter Danny guestEditor.; Otto Thomas guestEditor.
• Is Part Of: Physica status solidi. Volume 216:Issue 19(2019)
• Page Start: n/a
• Page End: n/a
• Publication Date: 2019-10-15
• Subjects: Solid state physics -- Periodicals; Solids -- Industrial applications -- Periodicals; 530.41
• DOI: 10.1002/pssa.201970061
• Languages: English
• ISSNs: 1862-6300

Abstract

Abstract : Nanoanalysis Sensoric micro and nanosystems involve research from materials chemistry, solid‐state physics, and microelectromechanical engineering. In article number1900106, Evgeniya Sheremet, Peter Meszmer, Raul D. Rodriguez and co‐workers present recent advances in scanning probe microscopy applied to micro‐ and nanoelectromechanical systems.