Cite
HARVARD Citation
Freitag, M. et al. (2019). Design, Modeling, Fabrication, and Verification of New Multifunctional MEMS/NEMS Components. Physica status solidi. 216 (19), p. n/a. [Online].
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Freitag, M. et al. (2019). Design, Modeling, Fabrication, and Verification of New Multifunctional MEMS/NEMS Components. Physica status solidi. 216 (19), p. n/a. [Online].