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HARVARD Citation
Siddiqi, M. et al. (n.d.). Numerical analysis of anchor loss and thermoelastic damping in piezoelectric AlN-on-Si Lamb wave resonators. Journal of micromechanics and microengineering. p. . [Online].
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Siddiqi, M. et al. (n.d.). Numerical analysis of anchor loss and thermoelastic damping in piezoelectric AlN-on-Si Lamb wave resonators. Journal of micromechanics and microengineering. p. . [Online].