Structure and morphology of atomic layer deposition grown ZnO thin film/nanostructure on polymeric template. (2019)

• Record Type: Journal Article
• Authors: Singh, Ajaib; Mathur, Aakash; Pal, Dipayan; Sengupta, Amartya; Singh, Rinki; Chattopadhyay, Sudeshna
• Is Part Of: Materials today. Volume 18:Part 3(2019)
• Page Start: 1517
• Page End: 1523
• Publication Date: 2019
• Subjects: ZnO thin film -- ZnO-polymer nanocomposites -- X-ray reflectivity (XRR) -- Structure-morphology; Materials science -- Congresses -- Periodicals; 620.1
• DOI: 10.1016/j.matpr.2019.06.621
• Languages: English
• ISSNs: 2214-7853

Abstract

Abstract: Zinc oxide (ZnO) was grown on polymer template, namely Poly (methyl methacrylate) (PMMA), by atomic layer deposition (ALD) technique. The detailed structural characterizations of the composite ZnO/PMMA film, through X-ray scattering techniques, indicate that on the PMMA template crystalline ZnO thin film was formed with its c-axis oriented along the surface normal. Combination of X-ray reflectivity (XRR) and atomic force microscopy (AFM) studies demonstrate the formation of high quality ZnO thin film (about 25 nm thick) on PMMA template, with more than 92% coverage and low surface/interface roughness. AFM results clearly show that the ZnO film consists of almost uniform nanoparticles with ∼24-30 nm in-plane size distribution, which is very much consistent with the observed size of the ZnO crystallites obtained from X-ray diffraction (XRD) study.